"This experimental device is a nanodevice development platform under a space-like vacuum environment. It is currently the world's largest vacuum interconnection research device. We are exploring new technologies for future nanodevice manufacturing." Suzhou Nanotechnology, Chinese Academy of Sciences According to Ding Sunan, deputy general director of the Nano-Blank Interconnection Laboratory Station of the Nano-Bionics Institute.
The picture shows Chinese scientists are building a nano-vacuum integrated experimental station in Suzhou, Jiangsu. (Photo by Xinhua News Agency reporter Jin Liwang)
He pointed out that the experimental station tried to pass the interconnection integration under ultra-high vacuum conditions and the verification of several major projects, break through the functional limitations of existing instruments and equipment, and achieve synergy effects in material preparation, test analysis and micro-nano processing technology, etc., for scientific research and strategy. The development of emerging industries provides an advanced open platform.
According to reports, the Nano Vacuum Integrated Experiment Station is based on the Suzhou Nano Institute of the Chinese Academy of Sciences, the team of Academician Xue Qikun of Tsinghua University, and the team of Academician Bao Xinhe of the Dalian Institute of Chemical Physics of the Chinese Academy of Sciences. The first phase was jointly built by the Chinese Academy of Sciences, Jiangsu Province, Suzhou City, and Suzhou Industrial Park. The construction funding was 320 million yuan and it is expected to be completed by 2018. After the completion of the first phase, there will be 100 meters of vacuum piping, connecting more than 30 devices.
The picture shows Chinese scientists are building a nano-vacuum integrated experimental station in Suzhou, Jiangsu. (Photo by Xinhua News Agency reporter Jin Liwang)
According to Ding Sunan, the ultimate goal of the Nano Vacuum Interconnect Station is to build an ultra-high vacuum pipeline with a total length of about 500 meters, interconnecting hundreds of large-scale instrumentation equipment for material growth, device preparation, and test and analysis to achieve different samples. The surface of the equipment is not oxidized or stained when it is transferred, and is not damaged by the external atmosphere. The total investment is about 1.5 billion yuan.
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